Michael Quinten's A Practical Guide to Optical Metrology for Thin Films PDF

By Michael Quinten

ISBN-10: 3527411674

ISBN-13: 9783527411672

ISBN-10: 3527664343

ISBN-13: 9783527664344

A one-stop, concise consultant on deciding upon and measuring skinny movie thickness via optical methods.

This functional e-book covers the legislation of electromagnetic radiation and interplay of sunshine with topic, in addition to the idea and perform of thickness dimension, and glossy functions. In so doing, it exhibits the features and possibilities of optical thickness decision and discusses the strengths and weaknesses of dimension units besides their overview methods.

Following an advent to the subject, bankruptcy 2 offers the fundamentals of the propagation of sunshine and different electromagnetic radiation in area and topic. the most subject of this publication, the selection of the thickness of a layer in a layer stack through measuring the spectral reflectance or transmittance, is taken care of within the following 3 chapters. the colour of skinny layers is mentioned in bankruptcy 6. ultimately, in bankruptcy 7, the writer discusses a number of business purposes of the layer thickness dimension, together with high-reflection and anti-reflection coatings, photolithographic structuring of semiconductors, silicon on insulator, obvious conductive motion pictures, oxides and polymers, skinny movie photovoltaics, and seriously doped silicon.

Aimed at business and educational researchers, engineers, builders and brands enthusiastic about all components of optical layer and skinny optical movie dimension and metrology, approach regulate, real-time tracking, and applications.

Content:
Chapter 1 creation (pages 1–5):
Chapter 2 Propagation of sunshine and different Electromagnetic Waves (pages 7–57):
Chapter three Spectral Reflectance and Transmittance of a Layer Stack (pages 59–80):
Chapter four The Optical dimension (pages 81–119):
Chapter five Thin?Film Thickness selection (pages 121–140):
Chapter 6 the colour of skinny movies (pages 141–147):
Chapter 7 functions (pages 149–185):

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Extra info for A Practical Guide to Optical Metrology for Thin Films

Example text

Jellison and Modine [34] derived a model based on a combination of the Tauc band egde and the Lorentz oscillator formulation. With this Tauc–Lorentz model, the imaginary part of the complex dielectric function of amorphous materials with band gap (mainly semiconductor materials) can be modeled as e2TL ðvÞ ¼ À Á2 v2P vres Á c Á vÀvgap : À Á v v2 Àv2 2 þ v2 c2 res ð2:106Þ Here, the oscillator has a resonance frequency vres and a damping constant c. vgap is the frequency corresponding to the band gap energy Egap ¼ hvgap.

37]. long wavelengths. At wavelengths longer than 1000 nm, this thick wafer slowly becomes transparent. For discussion of the transmittance, it seems therefore appropriate to study thinner wafers. 24d shows the reflectance and transmittance of a layer with only d ¼ 10 mm. The differences compared to the thick layer are obvious. The layer increasingly becomes transparent for wavelengths longer than 600 nm. This also influences the reflectance as now light reflected at the rear side of the layer contributes to the reflectance, making it higher than for the thick layer.

In general, x depends on E, that is, x(E). This field dependence can be described by a series expansion of P in powers of E, where susceptibilities xijk. . are introduced, which are now a constant in relation to E X XX XXX Pi ¼ e0 xij Ej þ e0 xijk Ej Ek þ e0 xijkl Ej Ek El þ . . ð2:90Þ j j |fflfflfflfflfflfflffl{zfflfflfflfflfflfflffl} linear term xð1Þ k |fflfflfflfflfflfflfflfflfflfflfflfflfflffl{zfflfflfflfflfflfflfflfflfflfflfflfflfflffl} quadratic term xð2Þ j k l |fflfflfflfflfflfflfflfflfflfflfflfflfflfflfflfflfflfflfflfflfflfflfflfflffl{zfflfflfflfflfflfflfflfflfflfflfflfflfflfflfflfflfflfflfflfflfflfflfflfflffl} cubic term xð3Þ ðanisotropic mediumÞ for each component i ¼ x, y, z of P.

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A Practical Guide to Optical Metrology for Thin Films by Michael Quinten


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